| 摘要 |
The present invention relates to granite plates of an assembly-type structure and an XY stage using the same, and more specifically to an XY stage capable of responding to display panels under a scaling-up trend using granite plates of a disassembly- or an assembly-type that have easy producibility while being able to bring about cost savings. The granite plates of an assembly-type structure applied to the XY stage according to the present invention are characterized by comprising; a pair of guide granite plates with formation of guide rails of an 'L'-shaped cross section having a horizontal face and a vertical face separated by a prescribed distance and allowing a linear movement in X-axis direction at an upper end of the vertical face; and the first- and the second-stage granite plates assembled in a direction perpendicular to the pair of granite plates with both ends being placed on a horizontal face of the pair of guide granite plates, while each vertical face at both ends is arranged to touch the vertical face of the pair of guide granite plates, and separately arrayed in mutual parallel to place an inspection subject on. |
