| 摘要 |
According to the present invention, a thickness of a film formed at a surface of a test object is measured, and data on film composition is obtained conveniently on a non-contact and non-destructive basis. A spectroscopic instrument (10) measures spectroscopic data of the test object which is already known. A calculation unit (22) extracts a feature quantity of the spectroscopic data through a base decomposition of the measured spectroscopic data, and calculates a correlation between the feature quantity and the composition and the thickness of the film formed at the surface of the test object which is already known. The spectroscopic instrument (10) measures the spectroscopic data of the test object, and the calculation unit (22) performs the base decomposition of the measured spectroscopic data of the test object to extract the feature quantity of the spectroscopic data. Based on the correlation between the feature quantity of the spectroscopic data of the test object which is already known and the thickness of the film and the composition, the thickness and the composition of the film formed at the surface of the test object are calculated. |
