| 摘要 |
A linear device is provided which can greatly reduce an amount of leakage of fine particles that are produced between a rolling element raceway and rolling elements to the outside of the device and which is therefore suitable for a semiconductor production apparatus or liquid crystal display panel production apparatus or other clean environment. In a linear device, each of a pair of seal members is formed to a shape which has a clearance of 0.025 to 0.15 mm in range with respect to a raceway member when cut along a direction perpendicular to the axial direction of the raceway member in a state attached to a moving member. Grease with a worked penetration of 175 to 250 is coated between the rolling element raceway and the rolling elements. |
