具有软性板的吸附平台装置,申请号TW102222906-传众专利搜索

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发明名称	具有软性板的吸附平台装置
摘要
申请公布号	TWM477669	申请公布日期	2014.05.01
申请号	TW102222906	申请日期	2013.12.05
申请人	吴敏郎桃园县八德市中华路275巷9号	发明人	吴敏郎
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人	康清敬台北市大安区敦化南路2段77号19楼
主权项
地址	桃园县八德市中华路275巷9号

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