发明名称 Methods of forming semiconductor devices having diffusion regions of reduced width
摘要 Semiconductor devices and methods for forming semiconductor devices are provided, including semiconductor devices that comprise one or more diffusion regions in a semiconductor, the one or more diffusion regions being adjacent to a gate formed adjacent to a surface of the semiconductor (e.g., a semiconductor substrate). The one or more diffusion regions comprise a first width at a depth below the surface of the semiconductor and a second width near the surface of the semiconductor, the second width of the one or more diffusion regions being less than about 40% greater than the first width.
申请公布号 US8709929(B2) 申请公布日期 2014.04.29
申请号 US201213604411 申请日期 2012.09.05
申请人 LIU LEQUN;HU YONGJUN JEFF;KHANDEKAR ANISH A.;MICRON TECHNOLOGY, INC. 发明人 LIU LEQUN;HU YONGJUN JEFF;KHANDEKAR ANISH A.
分类号 H01L21/265;H01L29/78 主分类号 H01L21/265
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