| 摘要 |
PROBLEM TO BE SOLVED: To obtain high definition in a radiation detector having a pixel electrode and using gas amplification, particularly by uniformly and finely forming a pixel electrode, and thereby, to increase detection sensitivity of the radiation detector.SOLUTION: A first mask and a second mask each comprising a dry film resist are formed on a principal surface and a back surface side of a metal substrate, respectively. The first mask includes a plurality of cylindrical first through-holes formed therein. The second mask includes: a plurality of cylindrical second through-holes formed at the same positions as the plurality of first through-holes; and a plurality of slot-like third through-holes formed as separated from the second through-holes via annular non-through-hole portions centering the respective cylindrical second through-holes. The metal substrate is subjected to a plating process via the first mask and the second mask so as to fill the plurality of first through-holes of the first mask, and the plurality of the second through-holes and the plurality of third through-holes with a first plating material and a second plating material, respectively, both having higher electric resistance than that of the metal substrate. |
