| 摘要 |
Provided are an apparatus for economically coating a protection film that restricts an amount of a discarded protective film liquid, a laser machining apparatus having the apparatus for coating the protection film, and a method of coating the protection film. The laser machining apparatus includes a machining table for holding a workpiece, a laser machining unit for performing a laser-machining work with respect to the workpiece held on the machining table, a cassette placing table provided therein with cassettes for receiving a plurality of workpieces, and a carrying unit for carrying the workpiece from the cassette provided on the cassette placing table at least to the machining table. The laser machining apparatus includes a holding table having a holding surface for holding the workpiece; a protective film liquid discharging head having a slit-type discharge port for discharging a protective film liquid including water-soluble resin used to form a protective film on the surface of the workpiece held on the holding table; a first moving unit for relatively moving the protective film liquid discharging head so that the protective film liquid discharging head approaches the holding surface of the holding table or is spaced apart from the holding surface of the holding table; and A second moving unit for relatively moving the protective film liquid discharging head in parallel to the holding surface of the holding table. |
