| 摘要 |
A method of transporting a substrate with a substrate support, the method includes defining a frictional breakaway force between the substrate and the substrate support in a horizontal plane, moving the substrate in the horizontal plane along a horizontal trajectory, moving the substrate in a vertical direction along a vertical trajectory simultaneously while moving the substrate in the horizontal plane, and wherein the horizontal trajectory is determined based on the acceleration profile of the vertical trajectory and wherein the horizontal trajectory prevents the moving of the substrate from overcoming the coefficient of friction in the horizontal plane. |
