| 摘要 |
PROBLEM TO BE SOLVED: To uniformize an in-plane temperature of an object to be heated. SOLUTION: The heater includes a chamber 5 having an opening 6 for carrying in and out the object W to be heated, a heater 10 arranged in the chamber and heating the object W, a holding mechanism 11 arranged in the chamber and holding the object W, and a reflector 14 reflecting heat from the heater to the object W. The reflector is arranged on an opposite side to the object with the heater interposed therebetween, and an area of the reflector in a position near the opening is enlarged as compared with other positions. COPYRIGHT: (C)2011,JPO&INPIT |
