发明名称
摘要 PROBLEM TO BE SOLVED: To provide visual inspection equipment having fault resistance of processor elements (PE), and to provide a visual inspection equipment which displays a fault state without interrupting inspection. SOLUTION: The visual inspection equipment has an image distribution control unit 32 configured to perform image distribution control over connected PEs according to a connection state of the connected PEs, the image distribution control unit 32 including a PE state monitor unit 38 for monitoring the connection state of the PEs, a table setting unit 36 for allocating processing load values to the PEs according to the number of the connected PEs, and a detection speed setting unit 31 for setting an image detection speed according to the processing load value. The visual inspection equipment includes a monitor for displaying an inspection state, a processing speed, and the number of connected PEs. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP5466396(B2) 申请公布日期 2014.04.09
申请号 JP20080313461 申请日期 2008.12.09
申请人 发明人
分类号 H01L21/66;G01N23/225;G06T1/00;H01J37/22;H01J37/24;H01L21/027 主分类号 H01L21/66
代理机构 代理人
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