发明名称 METHOD FOR THE PERMANENT BONDING OF WAFERS
摘要 A method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate according to the following steps: forming a reservoir in a surface layer on the first contact surface, at least partially filling the reservoir with a first educt or a first group of educts, contacting the first contact surface with the second contact surface for formation of a prebond connection, and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with a second educt contained in a reaction layer of the second substrate.
申请公布号 KR20140039138(A) 申请公布日期 2014.04.01
申请号 KR20137017302 申请日期 2011.01.25
申请人 EV GROUP E. THALLNER GMBH 发明人 PLACH THOMAS;HINGERL KURT;WIMPLINGER MARKUS;FLOTGEN CHRISTOPH
分类号 H01L21/20;H01L21/18 主分类号 H01L21/20
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