| 摘要 |
This sintered body, which contains zinc (Zn), tin (Sn) and/or indium (In), magnesium (Mg), and oxygen (O), is an oxide sintered body characterized by having a total content of Sn and/or In in terms of SnO2 and/or In2O3 of 10-90 mol%, having an Mg content in terms of MgF2 of 15-50 mol% when the ratio of the number of Sn and/or In atoms to the number of Zn atoms is no greater than 1, and having an Mg content in terms of MgF2 of 1-40 mol% when the ratio of the number of Sn and/or In atoms to the number of Zn atoms is at least 1. The sintered body can form an amorphous film by means of a sputtering method or an ion plating method, and so has a superior effect in being able to suppress the occurrence of cracking or peeling of the film resulting from membrane stress. The thin film of the present invention is particularly useful as an optical thin film forming a protective layer for an optical information recording medium, an organic EL television thin film, and a transparent electrode thin film. |
