| 摘要 |
The present invention aims the efficiency of peeling processing as its purpose. A peeing device according to an embodiment includes a first maintaining part, a cutting part, a measurement part, and a position adjusting part. The first maintaining part maintains a first substrate among polymerizing substrates attached to the first substrate and a second substrate. The cutting part cuts an attachment part of the first and second substrates. The measurement part measures a distance from a set measurement reference position to a maintenance surface of the first maintaining part or a distance to an object placed between the reference position and the maintenance surface. The position adjusting part adjusts a cut part of the cutting part based on the measurement result and information about the thickness of the attachment substrate. |
