| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an electronic device, capable of simplifying a manufacturing process.SOLUTION: The method of manufacturing an electronic device 100 having a MEMS vibrator 20 and a circuit part 3 which are formed above a substrate includes the steps of: forming a first structure 22 constituting the MEMS vibrator 20 and a first electrode 42 of a capacitor 40 constituting the circuit part 3 by using a first silicon layer 4; and forming a second structure 24 constituting the MEMS vibrator 20, a second electrode 42 of the capacitor 40 constituting the circuit part 3, and a gate electrode 34 of a transistor 30 constituting the circuit part 3 by using a second silicon layer 8. |
