| 摘要 |
According to an embodiment of the present invention, a transfer robot for a weight and a substrate comprises: multiple fingers which are combined with robot hands and support either a substrate or a weight in the lower part thereof in order to commonly support the substrate and the weight; a substrate adsorbing unit which is placed in the finger in order to adsorb the substrate; and a weight supporting unit which supports the weight while guiding the weight to a predetermined position. |
