ILLUMINATION MONITORING DEVICE AND EXPOSURE APPARATUS WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To accurately detect illuminance and the quantity of light without reducing output of illumination light during exposure processing.SOLUTION: Each of a plurality of optical fibers 20 constituting an optical fiber group is configured to leak light from the optical fiber under clad exposure. In the optical fiber group, measurement region (non-shield regions) K of the plurality of optical fibers 20 are arranged closely in one row in a recess 60G formed on a base 60. At an upper side of the measurement regions K, a light transmission member 45 including fluorescent glass 70 is disposed and a photodetector 50 is disposed by the side of the light transmission member 45.