| 摘要 |
<p>The present invention relates to a vacuum valve (1) which includes: a valve plate (2) for closing an opening (3); and at least two piston cylinder units (4, 5) for pressing down the valve plate onto a valve sheet (6) surrounding the opening of the valve. At least one of the piston cylinder units includes: at least one cylinder (7) as components; and at least one piston (8) which is placed inside the cylinder in a movable manner as other components. One of the components of the piston cylinder unit is relatively fixed to the valve plate. At least one of the components of the piston cylinder unit is installed in a movable manner in a direction (9) parallel to the gap between the two adjacent piston cylinder units on one or more carriers (10, 11) of the valve.</p> |
