发明名称 HOLDING APPARATUS, EXPOSURE APPARATUS AND MANUFACTURING METHOD OF DEVICE
摘要 A holding apparatus includes a holding portion that includes a first member which contacts a portion of an object, a second member which at least a portion thereof is fixed to a base, and a connection member which is configured to connect the first and second members, and a driving unit which drives the holding portion to change at least a posture of the first member, wherein a relative positional relationship between the first member and the second member is changed via the connection member.
申请公布号 US2014049763(A1) 申请公布日期 2014.02.20
申请号 US201213985832 申请日期 2012.02.17
申请人 MIYAKAWA TOMOKI;NIKON CORPORATION 发明人 MIYAKAWA TOMOKI
分类号 G03F7/20 主分类号 G03F7/20
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