发明名称 |
Capacitive electromechanical transducer |
摘要 |
Provided is a transducer in which electrodes in a movable region are less likely to affect the mechanical characteristics of the movable region and in which nonuniform electrical potential distribution of the surface of the electrodes in the movable region is suppressed. The transducer includes first electrodes and second electrodes opposing the first electrodes with gaps interposed between therebetween. The resistance per unit area of the first electrodes differs in a movable region relative to the second electrodes and an unmovable region relative to the second electrodes. The first electrodes in the movable region and the first electrodes in the unmovable region have different thicknesses. |
申请公布号 |
US8654614(B2) |
申请公布日期 |
2014.02.18 |
申请号 |
US201113012699 |
申请日期 |
2011.01.24 |
申请人 |
KANDORI ATSUSHI;MAJIMA MASAO;CANON KABUSHIKI KAISHA |
发明人 |
KANDORI ATSUSHI;MAJIMA MASAO |
分类号 |
G01V1/155;B06B1/06;H02N1/00;H02N1/04;H04R19/00 |
主分类号 |
G01V1/155 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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