发明名称 OPTICAL WAVEGUIDE SUBSTRATE MANUFACTURING METHOD
摘要 A voltage is applied on an interdigitated electrode provided on one main face of a single-domain ferroelectric single crystal substrate to form a periodic domain inversion structure, the interdigitated electrode is removed and the one main face of the substrate is machined to remove the surface region of the substrate to form a machined surface. The optical waveguide is then formed in the substrate.
申请公布号 KR101363790(B1) 申请公布日期 2014.02.14
申请号 KR20097010443 申请日期 2007.11.09
申请人 发明人
分类号 G02B6/12;G02F1/377 主分类号 G02B6/12
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