| 摘要 |
PROBLEM TO BE SOLVED: To image a work accurately so as to perform visual inspection on the work with a high degree of precision.SOLUTION: The visual inspection device 20 for a work is a polyhedron, and performs visual inspection on a work W having leads Wa, Wb, Wc, Wd. The visual inspection device 20 includes: a transport nozzle 3 for transporting the work W by chucking the work; lighting means L1, L2, L3, L4, L5, L5x, L5y, L6 for irradiating illumination light to the work W; and imaging means N1, N2, N3, N4, N5, N6 for imaging the work W. The lighting means L5x irradiates light to a surface Ws4 from an oblique direction from an opposite side of a reference surface Ws0 of the work W, and the lighting means L5y irradiates light to a surface Ws6 from an oblique direction from the opposite side of the reference surface Ws0 of the work W. |
