发明名称
摘要 PROBLEM TO BE SOLVED: To prevent damage to a cable by reducing the length of the cable, to improve the mounting stability and machining accuracy of a dicing device, and to smoothly move a work table and the like, thereby facilitating the maintenance of the device. SOLUTION: There is disclosed a dicing device equipped with a blade to cut a work, a work table feed mechanism that moves the work table, with the work mounted thereon relatively with respect to the blade, and a spindle moving mechanism that supports a spindle movably. The spindle moving mechanism and the work table feed mechanism intersect perpendicularly. The spindle and the work table are connected to one end of the cable, respectively, and the spindle moving mechanism and the work table are disposed on the diagonal line of the enclosure, a pillar is arranged at the corner and side edge of the enclosure, and the intermediate part of the cable is fixed to the pillar. In addition, the end part thereof is so suspended as to be bent downward more than the fixed part of the cable, and the bending part is structured so as to turn with the fixed part as a fulcrum, following the move of the spindle or the work table in a diagonal direction. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP5404349(B2) 申请公布日期 2014.01.29
申请号 JP20090274658 申请日期 2009.12.02
申请人 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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