发明名称 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE TESTING METHOD
摘要 PROBLEM TO BE SOLVED: To realize a semiconductor device which reduces test failures arising from an excessive power supply load during an operation test, thereby making it possible to carry out an accurate operation test.SOLUTION: A semiconductor device comprises an element unit 2, a first power supply circuit 6, and a second power supply circuit 7 which supplies a testing power supply to each section of the first power supply circuit according to the progress of a prescribed test pattern in order to compensate for a voltage drop occurring in the first power supply circuit when the prescribed test pattern is executed during a test. The second power supply circuit includes: a testing power supply network 52; a switch group 53 having a plurality of switches for connecting each section of a regular power supply circuit and each section of the testing power supply network; a memory 54 for storing therein control data for controlling the connection of the switch group so as to compensate for a voltage drop on the basis of the result of simulation of the prescribed test pattern; and a testing power supply control unit for controlling the switch group on the basis of the control data read out from the memory synchronously with the execution of the prescribed test pattern.
申请公布号 JP2014011260(A) 申请公布日期 2014.01.20
申请号 JP20120145787 申请日期 2012.06.28
申请人 FUJITSU SEMICONDUCTOR LTD 发明人
分类号 H01L21/822;H01L21/82;H01L27/04 主分类号 H01L21/822
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