FILTERING APPARATUS FOR POLISHING SLURRY

摘要

The present invention relates to a filtering apparatus for polishing slurry with a metal filter. According to the present invention, the filtering apparatus for polishing slurry includes a slurry supply part; a filtering part filtering particles among the slurry supplied from the slurry supply part; and a slurry receiving part receiving the slurry filtered by the filtering part. The filtering part includes at least one metal filter.