发明名称 APPARATUS OF DEPOSITING ORGANIC THIN FILM
摘要 A thin film depositing apparatus includes a point evaporation source to supply deposition materials for depositing a thin film to a substrate which is upwardly arranged. Wherein, the point evaporation source is arranged under the substrate to face the substrate. A plurality of point evaporation sources are arranged on the thin film depositing apparatus. Based on the substrate, a gap between the point evaporation sources arranged to face the center of the substrate is wider than a gap between the point evaporation sources arranged to face the surroundings of the substrate.
申请公布号 KR20140005700(A) 申请公布日期 2014.01.15
申请号 KR20120073980 申请日期 2012.07.06
申请人 SEMES CO., LTD. 发明人 SUNG, BO RAM CHAN;KOO, KYO WOOG
分类号 H01L51/56;C23C14/24 主分类号 H01L51/56
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