| 摘要 |
The present invention includes: a step of forming a sacrificial layer on a glass material carrier substrate; a step of forming an adhesion reinforcement layer with a dehydrogenation hot plate (DHP) coating technique on the adhesion reinforcement layer; a step of forming a polymer material layer by coating a polymer material on the entire surface of the adhesion reinforcement layer; a step of forming a flexible substrate layer by hardening the polymer material layer; a step of separating the carrier substrate from the flexible substrate by generating vapor from the sacrificial layer by irradiating the outer side of the carrier substrate with laser beam. A manufacturing method of a flexible display device using the DHP coating technique makes the adhesion reinforcement material be dried and hardened as soon as the mist is sprayed after changing the liquid phase adhesive material into mist and fume spraying by mounting the carrier substrate on the hot plate, not only heating up the carrier substrate and but also spraying the liquid phase adhesive material on the sacrificial layer. |
