SEMICONDUCTOR MANUFACTURING APPARATUS HAVING VARIABLE TRANSFERRING PATHS AND IN-LINE SYSTEM HAVING THE SAME

摘要

The present invention relates to a semiconductor manufacturing apparatus having various transfer paths and an in-line system including the same. The semiconductor manufacturing apparatus includes: a vacuum processing space comprising one side port and the other side port on both sides which are facing each other; a first transfer path transferring a first member to the other side port by being inserted from the one side port; a second transfer path delivering a second member and a fourth member to the one side port through a branch node by being inserted from the other side port; and a third transfer path delivering a third member along the direction having a fixed angle with the second transfer path from the branch node on the second transfer path.