Thin film transistor array substrate, organic light emitting display device including the same, and manufacturing method of the thin film transistor array substrate

摘要

A thin film transistor array substrate includes a thin film transistor on a substrate, the thin film transistor including an active layer, a gate electrode, a source electrode, and a drain electrode; a capacitor including a lower electrode in a same layer as the active layer and an upper electrode in a same layer as the gate electrode; a pixel electrode in a same layer as the gate electrode and the upper electrode; a first insulation layer between the active layer and the gate electrode and between the lower electrode and the upper electrode; a second insulation layer on the first insulation layer, a protection layer extending along side surfaces of the lower electrode, and a third insulation layer on the protection layer and exposing the pixel electrode.