发明名称 |
RESIN CONTAINER COATING DEVICE |
摘要 |
<p>The present invention provides a resin container coating device capable of batch formation of films having equivalent quality on multiple resin containers. The resin container coating device is provided with: a chamber (40) in which multiple resin containers (B) are loaded and which is an external electrode; multiple internal electrodes (50) in which gas-conducting sections (51) for conducting the source gas are formed and which are inserted inside the multiple respective resin containers (B) loaded in the chamber (40); and a gas supply unit (70) for supplying the source gas to the chamber (40). The gas supply unit (70) comprises a source gas supply path (P1) and multiple branch gas paths (P2) that branch from the source gas supply path (P1) and communicate with the respective gas-conducting sections (51) of the multiple internal electrodes (50). A mass flow controller (74) for adjusting the flow of the source gas is installed in the source gas supply path (P1) and respective flow-adjusting valves (78) for adjusting the flow of the source gas are installed in the multiple branch gas paths (P2).</p> |
申请公布号 |
WO2013179886(A1) |
申请公布日期 |
2013.12.05 |
申请号 |
WO2013JP63370 |
申请日期 |
2013.05.14 |
申请人 |
NISSEI ASB MACHINE CO., LTD. |
发明人 |
SHIMADA KIYONORI |
分类号 |
C23C16/455 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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