发明名称 DEVICE USING ROLLERS FOR COATING
摘要 <p>Disclosed is a device for coating substrate rollers. A transfer device transfers substrates. A coating device sprays a coating solution to the surfaces of the substrates by using a roller. Nozzles are arranged on the upper part of the coating device and drop the coating solution to the roller for processes. A driving part moves the nozzles in the length direction of the roller and drops the coating solution in a liner motion. An injection member supplies the coating solution and a cleaning solution to the nozzles by using each connection pipe. The coating device drops the cleaning solution to clean the roller.</p>
申请公布号 KR101328158(B1) 申请公布日期 2013.11.18
申请号 KR20120060919 申请日期 2012.06.07
申请人 ARAONTECH CO., LTD. 发明人 CHOI, YOUNG GIL;CHOI, KYU WON;JO, HYUN JU
分类号 H01L21/027;H01L21/02 主分类号 H01L21/027
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