发明名称 |
DEVICE USING ROLLERS FOR COATING |
摘要 |
<p>Disclosed is a device for coating substrate rollers. A transfer device transfers substrates. A coating device sprays a coating solution to the surfaces of the substrates by using a roller. Nozzles are arranged on the upper part of the coating device and drop the coating solution to the roller for processes. A driving part moves the nozzles in the length direction of the roller and drops the coating solution in a liner motion. An injection member supplies the coating solution and a cleaning solution to the nozzles by using each connection pipe. The coating device drops the cleaning solution to clean the roller.</p> |
申请公布号 |
KR101328158(B1) |
申请公布日期 |
2013.11.18 |
申请号 |
KR20120060919 |
申请日期 |
2012.06.07 |
申请人 |
ARAONTECH CO., LTD. |
发明人 |
CHOI, YOUNG GIL;CHOI, KYU WON;JO, HYUN JU |
分类号 |
H01L21/027;H01L21/02 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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