发明名称 ADHESIVE COMPOSITION FOR A WAFER PROCESSING FILM
摘要 The present invention relates to an adhesive composition for a wafer processing film, a wafer processing film, and a semiconductor wafer processing method. In the semiconductor wafer processing process such as a dicing process or a back grinding process, a delaminating force with respect to a wafer to be attached may be effectively reduced to improve process efficiency and prevent the wafer from being warped or cracked.
申请公布号 US2013295747(A1) 申请公布日期 2013.11.07
申请号 US201213980170 申请日期 2012.03.07
申请人 KIM JANG-SOON;LG HAUSYS, LTD. 发明人 KIM JANG-SOON
分类号 H01L21/683 主分类号 H01L21/683
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