| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To increase the output of a gas laser without executing gas cyclic cooling by a blower, and to provide a high-quality laser beam. <P>SOLUTION: The gas laser oscillation device includes: a laser medium heating portion arranged in the upper side in the gravitation direction with respect to an exciting discharge space; a heat exchanger arranged in the upper side in the gravitation direction with respect to the laser medium heating portion; a laser gas passage formed by annularly connecting the heat exchanger, the exciting discharge space and the laser medium heating portion; and a laser gas overcooling portion arranged in the laser gas passage and provided between the heat exchanger and the exciting discharge space. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
