| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine particle detection system which is capable of appropriately detecting an amount of fine particles in gas and appropriately detecting the reduction in injection amount of compressed air and ions due to nozzle clogging.SOLUTION: A fine particle detection system 1 for detecting an amount of fine particles S in gas EG includes a detection unit 10, circuits 210, 240, and 230, and a compressed air port 70. The detection unit 10 includes: an ion gas injection source 11 which has a nozzle part 31 forming a nozzle 31N through which generated ions CP are injected together with compressed air AK; a fine particle charging unit 12 forming a mixture region MX and a collection pole 42; and an auxiliary electrode 53 assisting collection of floating ions CPF. An auxiliary electrode potential PV3 is generated by the variable auxiliary electrode power source circuit 240. A potential difference between the auxiliary electrode potential PV3 and a collection pole potential PV1 is defined as a trap voltage Vt. The system includes index detection means S54 to S5C for obtaining an index trap voltage Vt1-2 corresponding to a preliminarily determined amount of discharged floating ions CPFH and determination means S5F for determining whether the index trap voltage Vt1-2 is higher than an allowable voltage Vtmin or not. |
