发明名称
摘要 The invention provides a needle track inspection device, a detecting device with the same and a needle track checking procedure, capable of automatically detecting whether a basal layer of an electrode pad is exposed at the high precision. The needle track inspection device comprises a needle track region withdrawing part (50) for withdrawing the needle track region (13) from camera shooting data (D1), wherein the camera shooting data (D1) being obtained by a camera (72) for shooting an electrode pad (2), a greyscale grade data obtaining part (51) for obtaining the greyscale pattern corresponding to the pixel grey level and the pixel position on a center line (P) extending in the length direction of the needle track region for the needle track region (13), and a deep dug judging part (53) for judging whether the basal layer (6) is exposed based on the obtained greyscale pattern and the reference pattern when the basal layer (6) is exposed out of the needle track (10).
申请公布号 JP5326359(B2) 申请公布日期 2013.10.30
申请号 JP20080136105 申请日期 2008.05.23
申请人 发明人
分类号 H01L21/66;G01N21/956 主分类号 H01L21/66
代理机构 代理人
主权项
地址