发明名称 |
Display device, array substrate, thin film transistor and method for manufacturing the same |
摘要 |
Embodiments of the present invention relate to a display device, an array substrate, a thin film transistor and a method for manufacturing the same. The thin film transistor comprises a gate, an active layer and a gate insulating layer disposed between the gate and the active layer, the active layer is an oxide semiconductor, and the gate insulating layer comprises at least one layer of inorganic insulating thin film. With the gate insulating layer of the thin film transistor, it is possible that an adverse effect on the oxide semiconductor given by hydrogen-containing groups is effectively avoided, stability of the whole TFT device is enhanced to the most extent, and yield of final products is increased. |
申请公布号 |
EP2657973(A1) |
申请公布日期 |
2013.10.30 |
申请号 |
EP20120186634 |
申请日期 |
2012.09.28 |
申请人 |
BOE TECHNOLOGY GROUP CO. LTD. |
发明人 |
YUAN, GUANGCAI;LEE, WOOBONG |
分类号 |
H01L29/49;H01L29/66;H01L29/786 |
主分类号 |
H01L29/49 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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