发明名称 METHOD FOR MANUFACTURING INTERPOSER AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an interposer adaptive to narrowing pitches and increasing pins of terminal connection for mounting a semiconductor chip to a semiconductor device, and a method for manufacturing the semiconductor device.SOLUTION: A method for manufacturing an interposer comprises: an arranging step of arranging a plurality of fiber members 11 at prescribed pitches P; a block body manufacturing step; a base material manufacturing step; a through hole forming step; a continuity step; a patterning step; and a multi-layers wiring layer forming step. In the arranging step, the pitch P is set so that a relation of 2D&le;P<4D for a thickness D of the fiber member 11 is satisfied.
申请公布号 JP2013222942(A) 申请公布日期 2013.10.28
申请号 JP20120095676 申请日期 2012.04.19
申请人 DAINIPPON PRINTING CO LTD 发明人 SHIMADA OSAMU
分类号 H01L23/32;H01L23/12;H05K3/46 主分类号 H01L23/32
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