| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical inspection device that can effectively shield a light detection part even when a pitch between a plurality of light receiving areas is short.SOLUTION: An optical inspection device 10 comprises: a light detection part 20 that includes a plurality of light receiving areas 23 paralleled in a predetermined direction A and detects inspection light L in each of the light receiving areas 23; and a shield member 31 that covers a surface of the light detection part 20 including the plurality of light receiving areas 23 for an electromagnetic shield. The shield member 31 includes a translucent member 33 extending in the predetermined direction A and a conductive film 34 provided on a surface of the translucent member 33. The conductive film 34 includes a plurality of openings formed in parallel in the predetermined direction A so as to be respectively positioned on the plurality of light receiving areas 23, and a boundary part between mutually adjacent openings is composed of the conductive film 34. |
