CARRY-IN/OUT APPARATUS AND CARRY-IN/OUT METHOD OF CONTAINER FOR HOUSING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a carry-in/out apparatus of a container for housing a substrate which securely holds a carried-in hoop in a stable state and is used in a load port and the like which are further downsized.SOLUTION: A carry-in/out apparatus of a container for housing a substrate includes: a placement base 10 on which the container for housing the substrate is placed; a slide mechanism 20 including a slider 22 supporting the placement base 10 so as to move the placement base 10 forward and rearward between a container carry-in/out position where a container 5 is placed on the placement base 10 and a substrate carry-in/out position where the substrate is carried in/out from the container 5 on the placement base 10; and a rotary mechanism 30 including a rotating body 32 rotatably supporting the slide mechanism 20. The placement base 10 may rotate in a rotation position between the container carry-in/out position and the substrate carry-in/out position.