发明名称 |
LAMINATED POLISHING PAD AND METHOD FOR PRODUCING SAME |
摘要 |
The purpose of the present invention is to provide a method for readily producing a laminated polishing pad that is less susceptible to peeling between a polishing layer and a support layer or an intermediate layer even if polishing for a prolonged period causes higher temperatures, and that excels with respect to optical detection accuracy. This method for producing a laminated polishing pad comprises: a step for providing a light transmission region inside an opening (A) of a polishing region and preparing a polishing layer; a step for providing an adhesive member (X) containing a hot-melt adhesive to one side of the polishing layer; a step for providing a peelable protective member to a portion of the adhesive member (X) corresponding to the light transmission region; a step for bonding a support layer to the adhesive member (X) provided with the peelable protective member; and a step for removing the support layer of the portion corresponding to the light transmission region, and further removing the peelable protective member, to form an opening (B). |
申请公布号 |
WO2013153875(A1) |
申请公布日期 |
2013.10.17 |
申请号 |
WO2013JP55516 |
申请日期 |
2013.02.28 |
申请人 |
TOYO TIRE & RUBBER CO., LTD. |
发明人 |
NAKAMURA,KENJI |
分类号 |
H01L21/304;B24B37/013;B24B37/20 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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