发明名称 LAMINATED POLISHING PAD AND METHOD FOR PRODUCING SAME
摘要 The purpose of the present invention is to provide a method for readily producing a laminated polishing pad that is less susceptible to peeling between a polishing layer and a support layer or an intermediate layer even if polishing for a prolonged period causes higher temperatures, and that excels with respect to optical detection accuracy. This method for producing a laminated polishing pad comprises: a step for providing a light transmission region inside an opening (A) of a polishing region and preparing a polishing layer; a step for providing an adhesive member (X) containing a hot-melt adhesive to one side of the polishing layer; a step for providing a peelable protective member to a portion of the adhesive member (X) corresponding to the light transmission region; a step for bonding a support layer to the adhesive member (X) provided with the peelable protective member; and a step for removing the support layer of the portion corresponding to the light transmission region, and further removing the peelable protective member, to form an opening (B).
申请公布号 WO2013153875(A1) 申请公布日期 2013.10.17
申请号 WO2013JP55516 申请日期 2013.02.28
申请人 TOYO TIRE & RUBBER CO., LTD. 发明人 NAKAMURA,KENJI
分类号 H01L21/304;B24B37/013;B24B37/20 主分类号 H01L21/304
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