发明名称 WIRING SUBSTRATE WITH FILLED VIAS TO ACCOMMODATE CUSTOM TERMINALS
摘要 A probe card assembly and associated processes of forming them may include a wiring substrate with a first surface and an opposite surface, an electrically conductive first via comprising electrically conductive material extending into the wiring substrate from the opposite surface and ending before reaching the first surface, and a plurality of electrically conductive second vias, and a custom electrically conductive terminal disposed on the first surface such that said custom terminal covers the first via and contacts one of the second vias adjacent to said first via without electrically contacting the first via. Each of the second vias may be electrically conductive from the first surface to the opposite surface. The first via may include electrically insulating material disposed within a hole in the first via.
申请公布号 WO2013155256(A1) 申请公布日期 2013.10.17
申请号 WO2013US36092 申请日期 2013.04.11
申请人 FORMFACTOR, INC.;POWELL, SHAWN 发明人 POWELL, SHAWN
分类号 H01L23/48 主分类号 H01L23/48
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