| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of preventing stress from being caused to a movable body.SOLUTION: A physical quantity sensor 100 according to the present invention comprises: a substrate 10; a fixed part 32 and fixed electrode parts 39a, 39b that are fixed to the substrate 10; and a movable body 34 that includes a support part 35 provided around the fixed part 32 in a planar view, a movable electrode part 38 supported by the support part 35, extending along a first axis and disposed facing the fixed electrode parts 39a, 39b, and a spring part 36 connecting the fixed part 32 to the support part 35, and that can be displaced along a second axis intersecting the first axis. The support part 35 includes first beam parts 35a, 35b extending along the first axis and second beam parts 35c, 35d extending along the second axis. |
