| 摘要 |
PROBLEM TO BE SOLVED: To prevent the strength of a thin film from deteriorating below the design strength by the gas which is generated when burning the thin film and remains therein. SOLUTION: In the heating step for degassing, a thin film 20 with a large number of particles 21 being mixed in an organic silicon compound 22 is heated to allow a resin 21d in each particle 21 to be thermally decomposed and gasified, and gas 22a generated by the thermal decomposition of the organic silicon compound 22 is removed from the thin film 20. In the heating step for burning, the thin film 20 after the heating step for degassing is heated at the temperature higher than that of the heating step for degassing. A layer 21b of a ceramic material becomes dense, and a silicon compound 22b after the thermal decomposition is burned. COPYRIGHT: (C)2010,JPO&INPIT
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