POLYSILICON MANUFACTURING APPARATUS

摘要

PURPOSE: An apparatus for manufacturing polysilicon is provided to improve power efficiency by using a three phase alternate current power source. CONSTITUTION: A container body is combined with a base plate (10). Three electrodes (11) are installed on the base plate. A leg part (32) is connected to the three electrodes respectively. At least one load is arranged within the container body. A reaction gas source supplies a reaction gas into the container body.