发明名称 HIGH BREAKDOWN VOLTAGE EMBEDDED MIM CAPACITOR STRUCTURE
摘要 Methods and devices related to a plurality of high breakdown voltage embedded capacitors are presented. A semiconductor device may include gate material embedded in an insulator, a plurality of metal contacts, and a plurality of capacitors. The plurality of capacitors may include a lower electrode, a dielectric formed so as to cover a surface of the lower electrode, and an upper electrode formed on the dielectric. Further, the plurality of contacts may connect each of the lower electrodes of the plurality of capacitors to the gate material. The plurality of capacitors may be connected in series via the gate material.
申请公布号 KR101315911(B1) 申请公布日期 2013.10.10
申请号 KR20127005953 申请日期 2010.08.06
申请人 发明人
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
代理机构 代理人
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