| 摘要 |
PROBLEM TO BE SOLVED: To precisely position a substrate even when a thinned substrate is flexed.SOLUTION: A substrate 112 is raised by plural lift pins 20, and rollers 201X, 201Y are pressed to an edge section of the substrate 112 to position the substrate 112 at a predetermined position on a stage 102. At that time, a height of the lift pins 20 near the edge section of the substrate 112 among the plural lift pins 20 is adjusted so that the edge section of the substrate 112 almost vertically contacts side faces of the rollers 201X, 201Y. This can avoid a state such that the rollers 201X, 201Y cannot press the side face of the substrate 112 due to flexion of the substrate, so as to precisely position the substrate. |
