| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting system and an inspection device for an inspection of such an inspection object that includes diffused materials and glossy materials.SOLUTION: A lighting system illuminates an inspection object area of an inspection object in order to pick up the inspection object area to acquire an image, and is constituted of an illumination light source which emits parallel light or illumination light close to divergent light, and two holograms. A first hologram of the two holograms emits the illumination light to be made incident from the illumination light source as first diffraction light which is parallel light in the oblique direction, and the other second hologram of the two holograms has a structure that a center part area with low diffraction efficiency and a peripheral part area with high diffraction efficiency are concentrically arranged, and emits second diffraction light so as to be condensed within a predetermined range when the first diffraction light is made incident. |
