发明名称 GROOVE PROCESSING TOOL, GROOVE PROCESSING METHOD OF THIN-FILM SOLAR CELL USING THE SAME, AND GROOVE PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a groove processing tool capable of manufacturing an integrated thin-film solar cell in high yield.SOLUTION: Groove processing is performed to a thin film of a thin-film solar cell by using a groove processing tool that is composed of a rod-like body 81 and a truncated-cone shaped cutting edge region 82 formed at a tip of the body 81, wherein the cutting edge region 82 includes a bottom face 83 and a side face 84 extending from the bottom face 83 toward the body 81, a corner formed by the bottom face 83 and the side face 84 makes a cutting edge 85, and the processing tool is formed so as to be getting thinner from the bottom face 83 toward the body 84.
申请公布号 JP2013211465(A) 申请公布日期 2013.10.10
申请号 JP20120081865 申请日期 2012.03.30
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 YAMADA MITSURU;SOYAMA MASANOBU
分类号 H01L31/04 主分类号 H01L31/04
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