发明名称 |
NANOCRYSTALLINE DIAMOND FILM AND METHOD FOR FABRICATING THE SAME |
摘要 |
A uniform nanocrystalline diamond thin film with minimized voids is formed on a silicon oxide-coated substrate and a method for fabricating same are disclosed. The nanocrystalline diamond thin film is formed by performing hydrogen plasma treatment, hydrocarbon plasma treatment or hydrocarbon thermal treatment on the substrate surface to maximize electrostatic attraction between the substrate surface and nanodiamond particles during the following ultrasonic seeding such that the nanodiamond particles are uniformly distributed and bound on the silicon oxide on the substrate.
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申请公布号 |
US2013260157(A1) |
申请公布日期 |
2013.10.03 |
申请号 |
US201313799419 |
申请日期 |
2013.03.13 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE WOOK SEONG;LEE HAK JOO;BAIK YOUNG JOON;PARK JONG KEUK |
分类号 |
C23C16/27 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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