FOCUSED ION BEAM DEVICE AND ADJUSTING METHOD FOR ION BEAM OPTICAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a focused ion beam device capable of easily and precisely setting a focusing voltage.SOLUTION: A control terminal records calculated values of focusing voltages with which reference beam currents Athrough Aare obtained for all apertures #1 through #5 in a focusing voltage table in advance. The control terminal obtains an experimental value of the focusing voltage with which the reference beam current Ais obtained for the reference aperture #1. The control terminal obtains a correction value for the focusing voltage by subtracting the recorded calculated value for the reference aperture #1 from the experimental value. The control terminal obtains set values of the focusing voltages by adding respective correction values to the calculated values recorded for all the apertures #1 through #5, and records the resulting values in the focusing voltage table.