发明名称 CHAMBER CONTROL SYSTEM AND THE METHOD THEROF
摘要 PURPOSE: A chamber control system and a controlling method thereof are provided to facilitate management by automatically managing the temperature and time of a process. CONSTITUTION: A cabinet (200) includes a chamber. The chamber bakes a product according to a preset temperature and preset time. A touch panel (300) individually controls the product and displays a process state. A lot recognizer (400) distinguishes the lot of the product.
申请公布号 KR20130106112(A) 申请公布日期 2013.09.27
申请号 KR20120027760 申请日期 2012.03.19
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 KIM, WOO CHANG;JUNG, NAE WON;KIM, PILL JU
分类号 H01L21/02 主分类号 H01L21/02
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